CMOS AlN and ScAlN Pyroelectric Detectors with Optical Enhancement for Detection of CO₂ and CH₄ Gases

Abstract Gas sensors are useful for monitoring of greenhouse gases. As the move toward complementary metal‐oxide‐semiconductor (CMOS) compatible pyroelectric room temperature detectors is gaining traction due to its scalability 8‐in./12‐in. wafer area and integrable with CMOS electronics, aluminum nitride (AlN)‐ scandium (ScAlN)‐based developed sensing CO 2 CH 4 gases, which two gases that contribute significantly global warming. Leveraging gas absorption at respective mid‐infrared (IR) wavelengths, detected various concentrations fast response time ≈1 s. A compound parabolic collector (CPC) designed integrated into sensor enhance optical flux received by detector, demonstrates ≈10× signal improvement in presence. Further factors such as effect reduction random also tested on AlN‐ ScAlN‐based respectively observe behaviors both detectors. The results obtained provide further understanding behavior IR sensors, can potentially inspire new design selection applications.